Gas Description
The physicochemical properties of high-purity carbon dioxide gas are one of the carbon oxides. It is an inorganic substance, non flammable, usually non combustible, and non-toxic. At room temperature, it is a colorless and odorless gas with a density slightly higher than air (1.977g/l, so the laboratory can collect carbon dioxide by using the upward air discharge method). It is soluble in water and has no flash point. Colorless and tasteless. In semiconductor manufacturing, oxidation, diffusion, chemical vapor deposition, and supercritical cleaning gases are used.
Main uses
Application of high-purity carbon dioxide gas: oxidation, diffusion, chemical vapor deposition, supercritical cleaning gas in semiconductor manufacturing; It is also widely used in food, aerospace, welding, and other fields.
Storage and precautions
Store in a cool and ventilated warehouse, away from sparks and heat sources, and the temperature should not exceed 30 ℃. It should be stored separately from flammable materials and should not be stored together. The storage area should have emergency response equipment for leaks. Provide good ventilation conditions, operate in a closed environment, and operators must undergo specialized training and strictly follow operating procedures to prevent gas leakage into the workplace air. Stay away from flammable and combustible materials. Light loading and unloading during transportation to prevent damage to steel cylinders and accessories. Equipped with leakage emergency response equipment.
