Helium mass spectrometer leak detector for semiconductor equipment and material leak detection applications

Helium, high-purity helium

Vacuum equipment is increasingly being used in the semiconductor industry, such as vacuum separators (evaporation, sputtering), dry sandblasting equipment, heat treatment equipment (alloy furnaces, annealing furnaces), doping equipment (ion implantation machines, etc.), which will play an increasingly important role as indispensable conditions for the development of semiconductor technology. Vacuum equipment is increasingly being used in the semiconductor industry, such as vacuum deposition equipment (evaporation, sputtering), dry sandblasting equipment (ICP, RIE, PECVD), heat treatment equipment (alloy furnaces, annealing furnaces), doping equipment (ion implantation machines, etc.), which will play an increasingly important role as a prerequisite for the development of semiconductor technology. Helium mass spectrometer leak detectors are widely used today for leak detection in semiconductor systems.  

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Reasons for leakage detection of semiconductor devices and materials:

1. Semiconductor equipment has high requirements for vacuum degree, such as magnetron sputtering platform, electron beam evaporation platform, ICP, PECVD and other equipment. The occurrence of leaks may result in the inability to achieve high vacuum levels or require a significant amount of time, effort, and labor;  

2. It has high cleanliness and low water vapor in a high vacuum environment. Once dust and suspended particles or dust escape the environment, it can cause wafer contamination, alter the property of semiconductors, and damage their performance. Therefore, in the manufacturing process of semiconductor devices, helium mass spectrometry leak detection must be performed;  

3. Some semiconductor equipment requires the use of toxic or corrosive special gases. After helium mass spectrometry leak detection, these gases are less likely to leak under low leak rate vacuum conditions. This device can promptly remove unaffected gases and gas reaction products, ensuring the safety of workers and the atmospheric environment.  

4. Chip packaging, once there is a leak, the chip will fail. In summary, helium mass spectrometer leak detectors play a crucial role in the semiconductor industry.